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Increasing minority carrier lifetime in as-grown multicrystalline silicon by low temperature internal gettering

机译:通过低温内部吸杂增加已生长的多晶硅中的少数载流子寿命

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摘要

We report a systematic study into the effects of long low temperature (≤500 °C) annealing on the lifetime and interstitial iron distributions in as-grown multicrystalline silicon (mc-Si) from different ingot height positions. Samples are characterised in terms of dislocation density, and lifetime and interstitial iron concentration measurements are made at every stage using a temporary room temperature iodine-ethanol surface passivation scheme. Our measurement procedure allows these properties to be monitored during processing in a pseudo in situ way. Sufficient annealing at 300 °C and 400 °C increases lifetime in all cases studied, and annealing at 500 °C was only found to improve relatively poor wafers from the top and bottom of the block. We demonstrate that lifetime in poor as-grown wafers can be improved substantially by a low cost process in the absence of any bulk passivation which might result from a dielectric surface film. Substantial improvements are found in bottom wafers, for which annealing at 400 °C for 35 h increases lifetime from 5.5 μs to 38.7 μs. The lifetime of top wafers is improved from 12.1 μs to 23.8 μs under the same conditions. A correlation between interstitial iron concentration reduction and lifetime improvement is found in these cases. Surprisingly, although the interstitial iron concentration exceeds the expected solubility values, low temperature annealing seems to result in an initial increase in interstitial iron concentration, and any subsequent decay is a complex process driven not only by diffusion of interstitial iron.\ud\ud
机译:我们报告了长期低温(≤500C)退火对不同晶锭高度位置生长的多晶硅(mc-Si)的寿命和间隙铁分布的影响的系统研究。根据位错密度对样品进行表征,并使用临时的室温碘-乙醇表面钝化方案在每个阶段进行寿命和间隙铁浓度的测量。我们的测量程序允许在处理过程中以伪原位方式监视这些属性。在所有研究的案例中,分别在300°C和400°C的温度下进行充分的退火可以延长使用寿命,而仅在500°C的温度下进行退火才能改善从模块顶部和底部开始相对较差的晶片。我们证明,在没有任何可能由电介质表面膜引起的大量钝化的情况下,通过低成本的工艺可以大大改善较差的成膜晶片的寿命。底部晶圆获得了显着改善,在400 bottomC下退火35 h可将寿命从5.5 s延长至38.7 s。在相同条件下,顶部晶片的寿命从12.1µs改善到23.8µs。在这些情况下,发现间隙铁浓度降低与寿命提高之间存在相关性。出乎意料的是,尽管间隙铁的浓度超过了预期的溶解度值,但低温退火似乎导致间隙铁浓度的初始增加,并且随后的任何衰变都是复杂的过程,不仅是间隙铁的扩散所致。

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